RENA Technologies GmbH

Höhenweg 1, 78148 Gütenbach
Germany
Telephone +49 7723 9313-0
Fax +49 7723 9313-50
info@rena.com

Our range of products

Product categories

  • 01  Glass production/Production Technology
  • 01.14  Photovoltaic production/Production Technologies
  • 01.14.01  Wafer production
  • 01.14.01.01  Etching (wet/dry)

Our products

Product category: Etching (wet/dry)

InOxSide

  • Best-in-class solution for edge isolation, polishing and glass removal
    The RENA InOxSide® 3 automated processing equipment is designed as an integrated solution for edge isolation, rear side polishing and doped glass removal of silicon solar cells. Using the process for lowest cost of ownership and best performance, the InOxSide technology is the best choice for fabrication of Al-BSF, PERC and PERT silicon solar cells. It is based upon the RENA NIAK inline platform
  • Features and Benefits
  • Fully automated wet chemical single side etching in an inline type process on 5/6 lanes
  • Single side emitter etching, rear side polishing and removal of doped glasses (PSG/BSG)
  • Uses HF/HNO3/H2SO4 for single side etching yielding the best-in-class Cost of Ownership (CoO)
  • RENA patented technology
  • Adjustable rear side etching: 1 to 5 µm, up to 6 µm with RENA PreCon option)
  • Integrated rinsing and drying of wafer
  • Throughput up to 6000 wafer/hour
  • Compatible with M0, M1, M2, M4, M6 and M12 wafer size
  • Long bath lifetime due to feed-and-bleed function
  • Accurate dosing system for constant bath composition
  • Uses O-ring free roller design
  • Lowest breakage rate in industry
  • Based on RENA NIAK inline processing platform
  • High uptime
  • Easy maintenance

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Product category: Etching (wet/dry)

InEtchSide

Single Side Oxide Etching

The RENA InEtchSide automated processing equipment is designed for the single side removal of silicon oxide layers and doped glasses (e.g. PSG or BSG). This can be used in the fabrication of high efficiency cell concepts, e.g. for single side oxide etching using hydrofluoric acid (HF). It is based upon the RENA NIAK inline platform.

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Product category: Etching (wet/dry)

InCellPlate Cu

Advanced cost-cutting front side metallization
InCellPlate® Cu is RENA’s new inline equipment for direct plating of a Ni/Cu/Ag stack on silicon. Combined with laser ablation of the silicon nitride layer and subsequent inline anneal, it provides complete, screen-printing free front-side metallization for solar cell manufacturing.

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About us

Company details

Welcome to RENA

RENA is a global leader in manufacturing production machinery for wet chemical surface treatment. Companies all over the world are successfully employing our products in the semiconductor, medtech, glass, additive manufacturing and renewable energies sector.

Alongside standardized machinery with guaranteed processes, we also create individual production environments configured to specific customer needs. Our customers value our reliable, globally accessible customer service throughout and beyond our products’ service life.

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